Energy-free monitoring microsensors used for structural health monitoring


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Very high-performance electrostatic micromotors for linear or rotary drives

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Extremely precise silicon micromechanical parts produced on demand to meet particular specifications

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SilMach: a pioneer in MEMS micromechanics on silicon

“As a precursor in silicon 
micromechanics, we design, build and 
integrate high-performance MEMS.“​

  • Micromotors to drive mobile and/or connected systems
  • Energy-free microsensors used to check the health of structures.

We are anticipating the technologies of the future for you by stretching the limits of miniaturization. There is a world between the extreme precision of the patterns produced in white rooms and the very best precision mechanics, and between the aseptic world of silicon and the operational environment we service! SilMach® is at the heart of this technological transfer. Our know-how gives you the opportunity to benefit from the extraordinary potential of MEMS micromachines in your applications. The goal is to become more compact and create new functionality!

Our brands

SilMach designs, develops, builds and integrates:

  • The ChronoMEMS® solutions: energy-free hybrid MEMS mechanical sensors designed to monitor your structures.
  • The PowerMEMS® solutions: electrostatic micromotors and microsystems designed to drive the ultra-compact and extremely precise mechanisms used in connected objects, mobile technologies, embedded systems and scientific instrumentation.
  • MyMEMS® solutions: silicon parts and components produced on demand.

Success story

The company was founded in 2003 to take up a crazy and resolutely avant-garde challenge: to industrialize the first MEMS, while the discipline was still in an embryonic state on the international stage! Under the watchful eye of major institutions and renowned industrial companies, the CNRS start-up, under the leadership of its visionary founder, Patrice Minotti and his team of scientists, produced the first demonstrators, such as the emblematic “Dragonfly” bio-inspired nanodrone, which were qualified as genuine “technological breakthroughs”. The technological success and coverage in the international media marked the beginning of the SilMach® adventure!

In a few years, the company developed breakaway technologies for quartz watch drives, then invented its ChronoMEMS® structure monitoring system in partnership with the French Defence Armament Procurement Agency (DGA).

In 2003, SilMach® received the French Ministry of Research’s national award for new innovative technological companies, and has received numerous distinctions since then: the “Micron d’Or” at the 2004 and 2014 MICRONORA exhibitions, the Science and Defense award in 2006, the 2010 INPI prize for innovation, the 2014 General Chanson award for engineering. It became a member of BPI France Excellence in 2014, won the INPI Talents award in 2015 and the “Victor de l’Entreprise” award in 2016.

Thanks to these awards and its continuous efforts to innovate, today the company is well recognized and works with numerous industrial manufacturers in France and worldwide in the aerospace, nuclear, military, land transport and watch-making sectors, who are all convinced of the infinite potential of the applications on offer from SilMach®.


SilMach®’s engineers go beyond the conception, modeling, design and prototyping of MEMS solutions to develop all the mechanical and electronic interfaces required to integrate SilMach®’s innovations in the host products.

From the sale of upstream R&D services, to co-development partnership contracts, SilMach® supports its industrial customers up to the prototyping, pre-series and production phases, by making the products itself or by organizing technology transfers with specialized foundries.

All this know-how works to meet your needs.